Bio-MicroElectroMechanical Systems

Implantable materials and devices Implanted bio—microelectromechanical systems (MEMSs), chips, and electrodes MEMS/nanomaterial-based prosthetics Sensory aids (e.g.,)... 

While various BioMEMs (Bio-microelectromechanical systems) applications have been demonstrated using conductive polymers, particularly polypyrrole, there has yet been no reported use of conducting polymers solely for implantable biosensor devices. However, recent material advances such as those... 

Droplet microfluidics Micro total analysis system ( xTAS) xTAS Bio-MicroElectroMechanical systems (BioMEMS) Micro fluorescently-activated cell sorting (ixFACS)... 

MEMS (microelectromechanical systems) are systems with small device sizes of 1-100 pm. They are typically driven by electrical signals. To fabricate such systems materials like semiconductors, metals, and polymers are commonly used. MEMS technology fabrication is very cost-efficient. The structures are transferred by processes, which are applied to many systems on one substrate or even many of them simultaneously. The most important fabrication processes are physical vapor deposition (PVD), chemical vapor deposition (CVD), lithography, wet chemical etching, and dry etching. Typical examples for MEMS are pressure, acceleration, and gyro sensors [28,29], DLPs [30], ink jets [31], compasses [32], and also (bio)medical devices. 

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