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Arc cluster ion source

FIGURE 3.4 Schematic of pulsed arc cluster ion source. (A) aluminium plates, (B) insulator block (BN or Macor), (C) mixing chamberm, (D) extender with conical nozzle. Reprinted with permission from Ref. [73]. Springer Science+Business Media. [Pg.39]


See other pages where Arc cluster ion source is mentioned: [Pg.17]    [Pg.35]    [Pg.1668]    [Pg.103]    [Pg.38]    [Pg.38]    [Pg.38]    [Pg.17]    [Pg.35]    [Pg.1668]    [Pg.103]    [Pg.38]    [Pg.38]    [Pg.38]    [Pg.7]    [Pg.3]    [Pg.632]    [Pg.4]    [Pg.34]    [Pg.671]    [Pg.632]    [Pg.4]    [Pg.244]   
See also in sourсe #XX -- [ Pg.38 , Pg.39 , Pg.46 ]




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Pulsed arc cluster ion source

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