Aluminum Al

Fig. 1. Diagrammatic representation of the succession of layers in some layer lattice siHcates (12) where 0 is oxygen , hydroxyl , siHcon o. Si—Al aluminum C, Al—Mg O, potassium , Na—Ca. Sample layers are designated as O, octahedral T, tetrahedral and B/G, bmcite- or gibbsitelike. The...

It is always interesting to know the fate of the Fe species remaining on the surface. For the W plug application, after W CMP, the subsequent relevant processes are the deposition, patterning and etch of the Ti-Al (aluminum)-TiN stack. The Fe residuals on the surface will not cause any problem for the metal deposition because the entire surface is covered by metals. However, a problem may occur in the metal etch process because the BCI3 plasma chemistry can not etch away Fe. The reaction products between Fe and BCI3 are FeCl complexes, which are nonvolatile [22]. They... 

ACLS advanced cardiac life support ACS acute coronary syndrome, American Cancer S ety, American Ctrilege of Surgeons ADH antidiuretic hormone ADHD attention-deficit hyperactivity disorder ADR adverse drug reaction AE adverse events AF atrial fibrillation AHA American Heart Association Al aluminum... 

T. Ishimoto et al, Aluminum-Magnesium Alloys as Priming Compositions , JP 14359... 

Rabinow B et al. Aluminum in parenteral products analysis, reduction, and implications for pediatric TPN. J Parent Sci Tech 1989 43 132. 

C.M. Cawley et al, Aluminum Stearate Gels for Use as Flame-Thrower Fuels , JInstPetr 33, 721-55 (1947) CA42, 3572 (1948)... 

Drablos PA, Hetland S, Schmidt F et al. 1992. Uptake and Excretion of Aluminum in Workers Exposed to Aluminum Fluoride and Aluminum Oxide. Aluminum Assoc/et al. Aluminum Health 2nd Int Conf, Tampa, FL 157(4) Feb 2-6, 92. 

Aluminum (Al) Aluminum is a silvery white metal with a relatively low density of 2.7 g/cm3. For this reason, aluminum is a popular material for construction. Alloying aluminum with other metals improves its strength. Elemental aluminum does not occur in nature, and must be synthesized by the energy-intensive Hall process. Compounds containing aluminum are found in antiperspirants (aluminum chloride) and antacids (aluminum hydroxide). 

Tab. 13.4 CuO/Al thermites with highly oxidized (49% Al) aluminum nanoparticles.

Thomas, F. et al., Aluminum(III) speciation with acetate and oxalate, a potentiometric and 27Al NMR Study, Environ. Sci. Technol., 25, 1553, 1991. 

Na Sodium 12 Mg Magnesium 13 Al Aluminum 14 Si Silicon 15 P Phosphorus 16 S Sulfur 17 Cl Chlorine 18 Ar Argon... 

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