Airborne Contamination by Process

The exposure levels listed in Table 1 are the maximum values eited in the referenees that potentially relate to an employee exposure. They often represent less than an eight-hour exposure. Most of the exposures are the result of improper work practices and are not levels typically foimd in the semiconductor industry. 

Process Activity/E quipment Substance Maximum Exposure IReq 

GaAs InP Wafer Weighing Arsenic Arsenic Not Listed m 

Wafer Preparation Washing Silicon Wafers Methanol 931 ppm [6] 

Process Activity/E quip ment Substance Maximum Exposure [Ref  

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