Abstraction from Single-Crystal Silicon—the Molecular Beam Method

Abstraction from Single-Crystal Silicon—The Molecular Beam Method 

Madix and Schwarz have formed SiCl2 by using a molecular chlorine beam to abstract Si from a silicon single crystal. The reaction was carried out 

The rate of formation of SiClj at constant beam pressure was nearly constant with the temperature of the solid surface at high temperatures. But the reaction probability decreased rapidly with temperature below 1050° K. 

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D. Abstraction from Single-Crystal Silicon—The Molecular Beam Method... 

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