XPS Intensities and Sample Composition

S(fc k) is the spectrometer efficiency for detecting the electron at kinetic energy Ey (also called transmission function)  

z) is the mean free path of the photoelectron at kinetic energy k through the material present at depth z  

6 is the take-off angle, that is, the angle between the direction in which 

In the case of a homogeneous concentration through the sample, the following expression holds for the intensity of each element  

Cross-sections for the elements have been calculated and tabulated by Scofield [23]. 

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