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X-Ray proximity printing

Figure 1. Linewidth versus gap for Deep UV and X-ray proximity printing. Theoretical points correspond to the Gruen range for the maximum energy photoelectrons. Experimental points were measured by Feder and Spiller (27). Figure 1. Linewidth versus gap for Deep UV and X-ray proximity printing. Theoretical points correspond to the Gruen range for the maximum energy photoelectrons. Experimental points were measured by Feder and Spiller (27).
See other pages where X-Ray proximity printing is mentioned: [Pg.74]    [Pg.20]    [Pg.763]   
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