Weight loss profile, thermogravimetric analysis

A thermogravimetric analysis (TGA) profile of a typical alicyclic copolymer resist resin, poly(CBN-co-NBCA), is shown in Fig. 7.15. All of the alicyclic resist co-and terpolymers show similar TGA profiles. The deprotection temperature and decomposition temperature for the polymers are roughly 250°C and 400°C, respectively. At the deprotection temperature, roughly 25% weight loss associated with the deprotection event and corresponding to the loss of isobutylene and carbon... 

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