Vapor pressure dichlorosilane

TEMPERATURE "" Degree Fahrenheit Fig. 1. Vapor pressure curve for dichlorosilane. 

Dichlorosilane is a highly flammable, corrosive, and toxic gas at room temperature and atmospheric pressure. It causes severe bums on contact with eyes, skin, and mucous membranes. With water or moisture, it hydrolyzes rapidly to yield silica and silicon oxyhydride along with hydrochloric acid. It is shipped as a liquefied gas in low pressure cylinders at its vapor pressure of 9.1 psig (62.7 kPa) at 70°F (21.1°C). It can form flammable mixtures with air and oxidizing agents. 

Oxidation. AH inorganic siUcon hydrides are readily oxidized. Silane and disilane are pyrophoric in air and form siUcon dioxide and water as combustion products thus, the soot from these materials is white. The activation energies of the reaction of silane with molecular and atomic oxygen have been reported (20,21). The oxidation reaction of dichlorosilane under low pressure has been used for the vapor deposition of siUcon dioxide (22). 

The low-pressure chemical vapor deposition of silicon nitride on silicon involves two gaseous reactants dichlorosilane and ammonia. The following reactions are believed to be important under typical conditions of P = 1 torr and T= 1000 1200 K ... 

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