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Precipitation from the Gas Phase. The van Arkel gas decomposition process gives especially pure nitrides and nitride films, which under certain conditions may precipitate as single crystals, The nitndes include TiN, ZrN. [Pg.1078]

See other pages where Van Arkel gas decomposition process is mentioned: [Pg.1046] [Pg.54]

See also in sourсe #XX -- [ Pg.17 , Pg.207 ]