UV-Laser Assisted Photostructuring

The crystal size as function of el and Al is shown in Fig. 9.61. The surface roughness of the walls of the features after the etching away of the LMS 

Because of the bad absorption of the 355 nm radiation and the not even distribution of the energy density over the pulse cross section (maximum in the centre) despite the same diameter of the laser-beam focus, the crystallised and etched away structures do not exhibit the same areas compared with A = 308 nm, which is seen in Fig. 9.62. 

Complex structures e.g. free-standing meander springs and microfluidic elements are generated by Helvajian [212]. Controlling the intensity and the focus of the laser beam in relation to the critical dose it is also possible to create embedded structures [154,212,507]. 

---