Ultraviolet-visible ellipsometry

Kelly M K, Etohegoin P, Fuoh D, Kratsohmer W and Fostiropulos K 1992 Optioal transitions of Cgg films in the visible and ultraviolet from speotrosoopio ellipsometry Rhys. Rev. B 46 4963-8... 

Another recent innovation is concerned with eUipsometric measurements in the far infrared (Kircher et al. 1997). The principal advantage of eUipsometiy is that the optical constants of a system can be obtained without KK analysis and thus measurements do not have to be extended to o) — 0 and a) oo. Ellipsometry is an extremely successful technique in the near-lR—visible-near-ultraviolet regime where high-quality... 

In spectroscopic ellipsometry, (i/>, A) spectra are measured by changing the wavelength of light. In general, the spectroscopic ellipsometry measurement is carried out in the ultraviolet (UV)-visible region, although measurements in the infrared (IR) region have also been performed. 

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