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Torsional mirror

The deflection angle 6q of a single-axis torsional mirror as a function of applied voltage V has been solved analytically by Senturia [7] in cylindrical coordinates, which we follow here. The mirror is grounded and a voltage V is applied to the counter-electrode. The mirror tilt angle 6 is positive in the clockwise direction (Figure 4.5). [Pg.77]

Figure 4.3 Schematic diagram of a torsional mirror used for a laser scanner. (Reprinted with permission of Eric Peeters, PARC.)... Figure 4.3 Schematic diagram of a torsional mirror used for a laser scanner. (Reprinted with permission of Eric Peeters, PARC.)...
Figure 4.4 Silicon torsional mirror for a laser scanner. (Left) Glass wafer (Corning 7740) with counter-electrodes and 50 xm thick polyimide spacer layer. (Middle) Silicon mirror wafer with aluminum metallization. (Right) Bonded glass and silicon wafers with polyimide spacer layer. Figure 4.4 Silicon torsional mirror for a laser scanner. (Left) Glass wafer (Corning 7740) with counter-electrodes and 50 xm thick polyimide spacer layer. (Middle) Silicon mirror wafer with aluminum metallization. (Right) Bonded glass and silicon wafers with polyimide spacer layer.
Figure 4.5 A torsional mirror is tilted at an angle 0o when a voltage V is applied to a counter-electrode of length L and width W. The mirror is grounded. The initial gap between the mirror and the counter-electrode is g. The projection of the mirror intersects the axis at a point P. Figure 4.5 A torsional mirror is tilted at an angle 0o when a voltage V is applied to a counter-electrode of length L and width W. The mirror is grounded. The initial gap between the mirror and the counter-electrode is g. The projection of the mirror intersects the axis at a point P.
A MEMS torsional mirror has also been modeled using coupled electromechanical modeling as shown in Figures 4.6 and 4.7. [Pg.80]

Figure 4.6 Coupled electromechanical modeling of a MEMS torsional mirror. (Reprinted with permission of Sandeep Akkaraju from IntelliSuite v8.6 (2010), IntelliSense Software Corporation.) See color plate section. Figure 4.6 Coupled electromechanical modeling of a MEMS torsional mirror. (Reprinted with permission of Sandeep Akkaraju from IntelliSuite v8.6 (2010), IntelliSense Software Corporation.) See color plate section.
Dual-axis torsional mirror Lucent lambda router optical switch... [Pg.81]

Figure 4.12 Layout for two-axis torsional mirror. In the top left side of the figure the layout for the PolyO layer is shown. This includes the landing pads and counter-electrodes for the mirror and gimbal ring. The bottom left-hand side of the figure has the layout for the Poly2 layer, which has the mirror and gimbal ring. Figure 4.12 Layout for two-axis torsional mirror. In the top left side of the figure the layout for the PolyO layer is shown. This includes the landing pads and counter-electrodes for the mirror and gimbal ring. The bottom left-hand side of the figure has the layout for the Poly2 layer, which has the mirror and gimbal ring.
S. Mukherjee, Design, modeling and verification of MEMS silicon torsion mirror, Proc. SPIE 3226, p. 114 (1997). [Pg.96]

F. Pan, J. Kubby, E. Peeters, A.T. Tran, and S. Mukherjee, Squeeze film damping effect on the dynamic response of a MEMS torsion mirror,... [Pg.96]

See other pages where Torsional mirror is mentioned: [Pg.86]    [Pg.48]    [Pg.77]    [Pg.77]    [Pg.79]    [Pg.81]    [Pg.83]    [Pg.85]   
See also in sourсe #XX -- [ Pg.77 , Pg.78 , Pg.80 , Pg.86 ]



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Dual-axis torsional mirror Lucent lambda router optical switch

Mirrored

Mirroring

Mirrors

Single-axis torsional mirror

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