TMS Deposition on Multiple Cathodes Without Anode Assembly

TMS DEPOSITION ON MULTIPLE CATHODES WITHOUT ANODE ASSEMBLY 

DC cathodic plasma polymerization of TMS was carried out with multiple cathodes in a relatively large (178 liter) barrel-type metal reactor [2]. In such a reactor, no anode assembly was arranged inside the chamber. During the plasma polymerization process, the DC power was directly applied to the aluminum panels, which were loaded inside the reactor and used as cathodes. The grounded reactor wall functioned as the anode during the DC discharge. 

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