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Three-Layer Method with Self-Alignment Features

5 Three-Layer Method with Self-Alignment Features [Pg.77]

Master wafer with photoresist pattern for emitter tips [Pg.78]


Sixteen-Channel PDMS Emitter Prepared by the Three-Layer Method with Self-Alignment Features... [Pg.87]

Figure 4.11 Schematic of the self-alignment features in the three-layer method. (Reprinted with permission from ref. 23). Figure 4.11 Schematic of the self-alignment features in the three-layer method. (Reprinted with permission from ref. 23).

See other pages where Three-Layer Method with Self-Alignment Features is mentioned: [Pg.92]    [Pg.94]    [Pg.92]    [Pg.94]    [Pg.365]    [Pg.171]    [Pg.45]   


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Aligning layer

Alignment method

Layering method

Self aligned

Self-alignment

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