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Three-component systems cross-linking reaction

Fig. 25. Cross-linking reactions in a three-component resist system. Both O-alkylation and C-alkylation are shown. Fig. 25. Cross-linking reactions in a three-component resist system. Both O-alkylation and C-alkylation are shown.
Silane cross-linking - specifically the one-shot system - employs a three-component mix (of peroxide, silane, and tin catalyst, either in the form of liquid of dry masterbatch) that is added separately to the compound during extrusion. The reaction is in two stages, the temperature of extrusion being used to decompose the peroxide in order to react the silane molecule onto the polymer backbone. [Pg.162]

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See also in sourсe #XX -- [ Pg.329 ]



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