THERMODYNAMICS OF CVD

A CVD reaction is governed by thermodynamics, that is the driving force which indicates the direction the reaction is going to proceed (if at all), and hykinetics, which defines the transport process and determines the rate-control mechanism, in other words, how fast it is going. 

Chemical thermodynamics is concerned with the interrelation of various forms of energy and the transfer of energy from one chemical system to another in accordance with the first and second laws of thermodynamics. In the case of CVD, this transfer occurs when the gaseous compounds, introduced in the deposition chamber, react to form the solid deposit and by-products gases. 

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