THE CVD OF TITANIUM CARBIDE

Titanium (TiC) is an important industrial material produced extensively by CVD. It is an excellent refractory material which is unusually hard with high strength and rigidity and outstanding wear resistance. Its properties are summarized in Table 9.8. 

Lattice Parameter 0.4328 nm Space Group FmSm Pearson Symbol cF8 Composition TiCo,47to TiCg 99 Molecular Weight 59.91 g/mol Color silver gray X-ray Density 4.91 g/cm  

Debye Temperature 614K Specific Heat (Cp) 33.8 J/mole K 

Electrical Resistivity 50 lOpQcm Superconductive Transition Temperature 1.15K Hall Constant - 15.0 x lO cm A s Magnetic Susceptibility + 6.7 x 10 emu/mol 

Vickers Hardness 28-35 GPa Modulus of Elasticity 410-510 GPa Shear Modulus 186 GPa Bulk Modulus 240-390 GPa Poisson s Ratio 0.191 

---