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The CVD of Boron Carbide

The fi)llowing CVD reactions are used to dqjosit boron carbide. [Pg.286]

All three reactions use excess hydrogen. The most common reactions are Pl [Pg.286]

Boron carbide has also been deposited from diborane as a boron source in a plasma at 400 C as follows [Pg.287]

See other pages where The CVD of Boron Carbide is mentioned: [Pg.234] [Pg.286]

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Boron Carbide Carbides

CVD