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THE BLANKET TUNGSTEN APPROACH

In this chapter we will focus on contact and via fill using the blanket tungsten approach. In chapter 5 we will discuss another application of blanket tungsten, namely, that of tungsten as the interconnect material. [Pg.10]

The blanket tungsten approach diffusion coefficient is now given by ... [Pg.29]

See other pages where THE BLANKET TUNGSTEN APPROACH is mentioned: [Pg.10] [Pg.11] [Pg.12] [Pg.13] [Pg.14] [Pg.15] [Pg.16] [Pg.17] [Pg.18] [Pg.19] [Pg.20] [Pg.21] [Pg.22] [Pg.23] [Pg.24] [Pg.25] [Pg.26] [Pg.27] [Pg.28] [Pg.30] [Pg.31] [Pg.32] [Pg.33] [Pg.34] [Pg.35] [Pg.36] [Pg.37] [Pg.38] [Pg.39] [Pg.40] [Pg.41] [Pg.42] [Pg.43] [Pg.44] [Pg.45] [Pg.46] [Pg.47] [Pg.49] [Pg.50] [Pg.93]

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Blanket tungsten

Blanketing