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Temperature Control Loop and Sensor Resistance Readout

3 Temperature Control Loop and Sensor Resistance Readout [Pg.102]

The MOSFET heater is directly driven with this bit stream or optionally, the bit stream can be routed through a low pass filter. Early experiments revealed that driving the heater transistor with the raw bit stream might cause some electromigration due to the large peak currents that occur. The low-pass filter was therefore included to avoid such current peaks in order to enhance the device stability and life time. [Pg.102]

As the thermal capacitance and resistance of the hotplate provide a thermal low-pass transfer function (with the dominant pole corresponding to a characteristic time of 10-20 ms, depending on the fabrication process), the ZA modulator driving the hotplate constitutes a linear noise-shaping DAC with an output in the thermal domain. [Pg.102]




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Control loop

Readout

Resistance control

Resistive temperature sensors

Sensors, control loops

TEMPERATURE RESISTANCE

Temperature control

Temperature control controllers

Temperature control loop

Temperature controller

Temperature resistivity

Temperature resistivity and

Temperature sensors

Temperature-controlled

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