Technologies Suitable for Gas Sensor Fabrication

Korotcenkov, Handbook of Gas Sensor Materials, Integrated Analytical Systems, 

Uses liquid or gaseous precursors wiiri high vapor pressure Uses precursors with low vapor pressure. 

Precursors decompose at high temperatures Precursors decompose at low temperatures 

Deposits a solid film Deposits a liouid film 

Chemical reaction on wafer during deposition No chemical reaction on wafer during deposition 

---

Table 28.1 (continued) 28 Technologies Suitable for Gas Sensor Fabrication... 

Thus, a short survey of technologies suitable for gas sensor fabrication shows that we do not have ideal technology and we cannot name the best method of sensing-layer deposition. The selection of the method optimal for each specific engineering application should take into account the properties of the deposited material, the construction of the sensor design, and the possible consequences for the sensor s parameters during the application of the method selected. Will et al. (2000) considered and analyzed current methods and their possibilities for forming thin-fihn solid electrolytes. The results of that comparison are presented in Table 28.9. 

---