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Surface induction, resist development

Figure 10. Development rate vs. depth for KODAK 820 resist developed in 809 type developer. The surface layer dissolves at a lower rate than other parts of the resist, indicating a surface induction effect. (Adapted from Ref. 45.)... Figure 10. Development rate vs. depth for KODAK 820 resist developed in 809 type developer. The surface layer dissolves at a lower rate than other parts of the resist, indicating a surface induction effect. (Adapted from Ref. 45.)...
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