Surface and Volume Recombination of F Atoms in Transport Tube

Surface and Volume Recombination of F Atoms in Transport Tube 

The F-atom thermal desorption reverse to (8-67) caimotbe neglected. The adsorption rate (8-67), that is, the number of F atoms adsorbed per unit time and area, is (Christman etal., 1974) 

Volume recombination of F atoms in the transport tube is due to the three-body reaction 

Adsorbed particle Type of sorption Desorption energy, eV 

The rate eoeffieient for the volume reeombination is A = 2.21 10 cm /mol s (Ultee, 1977) at 300 K and pressures from 1 to 35 Torr. The reverse reaetion is not relevant because of low temperature in the tube. Dissociation of F2 takes place at temperatures above 1300 K. 

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