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Structures 1 Silicon Dioxide as Insulator

2 ELECTRICAL CHARACTERISATION OF MIS STRUCTURES 6.2.1. Silicon dioxide as insulator [Pg.590]

3 X 10 cm 3- The value of Vf for this device (+17 V) is high, and we consider that this is due to the presence of charged impurities present in the SiC 2 layer (similar values for Vf are found for devices fabricated on the same substrate batch). The fall-ofl in capacitance with frequency is untypically rapid for this device for which the contact resistances are high. [Pg.590]

In addition to the differential capacitance we have also measured the conductance, G(co) this can give sensitive indication of the presence of dissipative processes associated with the charge injection process [67]. For example, if there are trap states, possibly associated with the interface, Aese give a peak in G(o)) as (d is taken through the characteristic [Pg.591]




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