Structure effect on dissolution inhibition

Base catalyzed reaction As for the base catalyzed reaction, two out of the four major products were isolated as shown in Table 2. Figure 11 shows the probable reaction scheme. Unlike photochemical or thermal reactions, base catalyzed reaction seems to lake place upon the nucleophilic attack of hydroxy or phenoxy anions to the diazo group. It should be reminded that BC-F3 also implies a crosslinking structure. On the real resist surface NQD would crosslink with novolak resin as shown in Figure 12. This reaction is regarded as one of the mechanisms of the dissolution inhibition effect. 

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