Spectrometer rotary vane

Example The vacuum system of non-benchtop mass spectrometers consists of one to three rotary vane pumps and two or three turbo pumps. Rotary vane pumps are used for the inlet system(s) and as backing pumps for the turbo pumps. One turbo pump is mounted to the ion source housing, another one or two are operated at the analyzer. Thereby, a differentially pumped system is provided where local changes in pressure, e.g., from reagent gas in Cl or collision gas in CID, do not have a noteworthy effect on the whole vacuum chamber. 

The DBMS vacuum system is shown in Fig. 1 and consists of two differentially pumped chambers and a quadrupole mass spectrometer. The imiization chamber and analysis chamber are pumped by two turbomolecular pumps, respectively, which are backed by diaphragm pumps or rotary vane pumps. The quadrupole mass spectrometer is located in the analysis chamber. The time constant of the mass spectrometer is typically in the millisecond regime. The electrochemical cell is connected to the ionization vacuum chamber via a valve at position 3 (see Fig. 1). 

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