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Introduction of the Si specimens into a vacuum chamber should be done carefully. When the specimen is in the atmosphere, H Si(lll) and organic-modified Si are not positively contaminated within a short period. The largest chance of contamination is when the surface is in the stage of initial vacuum pumping. The residual gas in the vacuum generated by oil rotary pump is water and oil, and the... [Pg.6336]

See other pages where Specimen rotary stage is mentioned: [Pg.702] [Pg.702] [Pg.136] [Pg.404] [Pg.310] [Pg.542] [Pg.202] [Pg.314]

See also in sourсe #XX -- [ Pg.26 , Pg.49 ]