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Special Topic 6.27 Photolithography and UV curing

In positive-tone imaging, a high-sensitivity photoresist is usually composed of a photoinitiator and a polymer, the degradation of which is typically based on chemical [Pg.437]

Another industrial application, UV curing, is a technologically advanced process by which monomers/oligomers/polymers, usually in the presence of photoinitiators, undergo polymerization and cross-linking upon UV irradiation. The process is utilized [Pg.438]

Recommended review articles.110 124 151 1526 Homogeneous Transition Metal Photocatalysis [Pg.440]


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Photolithography

Special topics

UV curing

UV-cured

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