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Solvent-assisted microcontact molding SAMIM

Solvent-Assisted Microcontact Molding (SAMIM) A small amount of solvent (e.g., methanol, ethanol, or acetone) is spread on a patterned PDMS stamp which is placed on a polymer, such as photoresist. The solvent swells the polymer and causes it to expand to fill the surface relief of the stamp. Feature size as small as 60 nm can be reached. [Pg.1078]


See other pages where Solvent-assisted microcontact molding SAMIM is mentioned: [Pg.1300]    [Pg.43]    [Pg.47]    [Pg.55]    [Pg.1300]    [Pg.43]    [Pg.47]    [Pg.55]    [Pg.815]    [Pg.264]    [Pg.414]    [Pg.415]   
See also in sourсe #XX -- [ Pg.43 , Pg.47 ]




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