SIMS instruments schematics

Figure 14.38 Partial schematic diagram of an SIMS instrument equipped with an ion gun source and a quadrupole mass analyzer.

Fig. 4.1 Sample on silicon shards, (a) Silicon substrate with sample, (b) Silicon substrate with sample after freeze-fracture, showing the exposed area, (c) Schematic diagram of the freeze-fracture chamber attached to the TOF-SIMS instrument. Thermocouple attached to the bottom of the vertical transfer rod is not shown, ((c) Reproduced from (12) with permission from the American Chemical Society.)...

In modern static SIMS instruments, the most efficient spectrometer is the time of flight spectrometer. It has typical current densities of the order of 1 nA/cm, which corresponds to approximately lO particles/cm s [23, 24]. The emitted secondary ions are separated according to their mass In this spectrometer. Figure 6 shows schematically the principle of the time of flight measurement. 

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