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Silmethylene polymers

Babich ED, Paraszcak J, Hatzakis M et al. (1989) A comparison of the E-beam sensitivities and relative 02-plasma stabilities of otganosilicon polymers. Part 111. Lithographic characteristics of poly-1,1,3-trimethyl-l-sila- and poly-1,1,3,3-tetramethyl-l,3-disilacyclobutenes and related silmethylene polymers. Microelectronic Eng 9 537-542... [Pg.149]

Nametkin NS, Vdovin VM, Zelenaya AV (1997) Preparation of silmethylene polymers. Patent SSSR 214809 Bull of Inventions 21... [Pg.150]

TgS for polymers with architectures similar to PDMS are given in Table XII 21, 81). The TgS of poly(dimethylsilazane) and poly(dimethyl-silmethylene) lie between those of PDMS and poly(isobutylene) (critical surface tensions of wetting of 24 and 27 mN/m, respectively [70]). These values suggest that poly(dimethylsilazane) and poly(dimethylsilmethylene) will have critical surface tensions of wetting in the 25-26-mN/m range. [Pg.729]

See other pages where Silmethylene polymers is mentioned: [Pg.203]    [Pg.3]    [Pg.40]   
See also in sourсe #XX -- [ Pg.130 , Pg.139 ]



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