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Silicone membranes vapor recovery

An existing industrial application of the ultrapure hydrogen separated by dense Pd alloy membranes is for electronics industry. In the fabrication of silicon chips, hydrogen acts as a carrier to transport small quantities of vaporized chemical compounds required to "dope" the chip to the surface of the silicon wafer [Philpott and Coupland, 1988]. The hydrogen used must be of a very high purity. The membrane units are used not only for gas purification but also for hydrogen recovery from hydrogen>rich gas streams. [Pg.259]


See other pages where Silicone membranes vapor recovery is mentioned: [Pg.349]    [Pg.663]    [Pg.664]    [Pg.315]    [Pg.345]    [Pg.63]    [Pg.514]    [Pg.112]   
See also in sourсe #XX -- [ Pg.664 ]




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