Silicon collision cross-section

However, other data such as the small difference observed in the Si NMR chemical shift (0.9 ppm upheld from TgPhg) and the absence of any measurable Si-F coupling show that the interaction between the huoride ion and the silicon atoms is small. Studies to evaluate the collision cross section of TgPhg using Na show that the cation attaches itself to the outside of the POSS cage and does not significantly distort the structure. 

Collision Cross-Sections and Shape of Neutral Silicon Cluster Isomers... 

The cross section of the collision region that the particle impacts with the Si surface with an incident angle of 45° at a speed of 2,100 m/s is shown in Fig. 16 [28]. As the particle impacts into the Si surface layer, the contact region of the Si surface layer transforms from crystal into amorphous phase immediately. The area of the depressed region and the thickness of the amorphous layer increase with the penetration depth of the particle (Figs. 16(a)-16(c)). After it reaches the deepest position, the particle then moves both upwards and rightwards, and some silicon atoms ahead of the particle are extruded out and result in a pileup of atoms. Then the released elastic deformation energy of the Si surface pushes... 

Dissociative excitation of molecules by electrons is a key process in many industrially important plasmas because it is the mechanism that provides the activated radicals that initiate the surface chemistries of interest. For example, many of the gases used in the etching of silicon do not display any reactivity in the absence of plasma. The construction of detailed models of these plasmas relies on a reliable data base of cross sections. Unfortunately, electron-impact dissociation cross sections are extremely difficult to measure and there are only a handful of cases where good data exist. Chlorine gas, which is widely used in the plasma etching of semiconductors, is one such example. Cross sections for ionization and dissociative electron attachment were measured during the 1970s and there has been one experimental study of electron impact dissociation. Cross sections for other dominant electron collision processes have been derived from Boltzmann analysis and early swarm measurements. ... 

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