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Silane-argon discharges

Sheath Properties of an Argon-Silane and Two Silane-Hydrogen Discharges"... [Pg.103]

I g. 2.9. The density of various radicals relative to the silane concentration for low power discharges in pure rilane and silane/argon mixtures (Gallagher and Scott 1987). [Pg.32]

Robertson. R., and Gallagher, A., Mono- and di-silicon radicals in silane-argon DC discharges. 7. Appl. Phys. 59, 3402-3411 (1986). [Pg.296]

Plasma etching (e.g., nitrogen, argon, oxygen, water vapor) Plasma (gas discharge) (RF, microwave, acoustic) Radiation grafting (electron beam and y-irradiation) Silanization... [Pg.284]

See other pages where Silane-argon discharges is mentioned: [Pg.97]    [Pg.101]    [Pg.119]    [Pg.97]    [Pg.101]    [Pg.119]    [Pg.97]    [Pg.119]    [Pg.125]    [Pg.184]    [Pg.208]    [Pg.119]    [Pg.120]    [Pg.119]    [Pg.120]    [Pg.84]    [Pg.85]    [Pg.400]    [Pg.146]    [Pg.385]    [Pg.48]    [Pg.269]    [Pg.547]    [Pg.42]    [Pg.545]    [Pg.192]   
See also in sourсe #XX -- [ Pg.97 ]



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Silane discharges

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