Si-SiC-C ceramic

Sectioning Diamond wheel Mounting Hot mounting in Bakelite  

Step Abrasive Grain Working Lubricant Load RPM Time 

Grinding Diamond 30 Disk or film Wasser 22 200 plan 

Polishing Diamond 9 Perforated synthetic fiber cloth Suspension 22 150 10 

Etching . (1) On Si with 38 parts HNO3,12 parts HF, 42 parts CH3COOH, and 0.1 parts iodine (all parts by volume). 

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Figure 91(a) and (b). (Base) Si-SiC-C ceramic, (a) Unetched BF. White silicon is surrounded by gray SiC. Carbon appears black, (b) Unetched DIC. Silicon stands out with a three-dimensional appearance... 

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