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Shadow mask proximity printing

The shadow mask proximity printing technique projects the shadow image of the transmission mask onto a resist-coated wafer by scanning a 1-mm-diameter... [Pg.752]

A simple printing scheme such as shadow masking (i.e., proximity or contact printing) can be used while stiU producing high aspect ratio structures with relatively straight sidewalls. [Pg.3324]


See other pages where Shadow mask proximity printing is mentioned: [Pg.752]    [Pg.752]    [Pg.16]    [Pg.19]    [Pg.20]    [Pg.763]    [Pg.2218]    [Pg.1347]    [Pg.2076]    [Pg.54]    [Pg.59]   
See also in sourсe #XX -- [ Pg.752 ]




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Proximal

Proximates

Proximation

Proximity

Proximity printing

Shadow

Shadow mask

Shadow masking

Shadow printing

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