Scattering of ions at surfaces

Projected trajectories for 10-keV H ions on carbon and gold (100 trajectories each) calculated with the TRIM code (after Eckstein, 1991). 

Particularly at low incident energies, the incident ion has a fair chance to escape deposition or implantation and be backscattered instead. The particle reflection coefficient R is defined as the ratio of the number of reflected relative to the number of incident particles (ions), 

The calculated particle reflection coefficients for nickel with H and Ne ion bombardment versus incident energy using the TRIDYN code (Biersack and Eckstein, 1984) are displayed in Fig. 12. The reflection coefficient is rather large 

---