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Roughing, vacuum crossover

Rough vacuum (vacuum technology) Pressure from atmospheric to about SOmTorr. Alternatively, pressure from atmospheric pressure to the crossover pressure. See also Crossover pressure. [Pg.690]

Time to crossover pressure (roughing to high vacuum pumping)... [Pg.19]

Time to reach the crossover pressure i.e., the pressure at which point the system is changed from roughing to high vacuum pumping. [Pg.134]

Crossover pressure (vacuum technology) The chamber pressure at which the vacuum pumping system is switched from the rough pumping mode (roughing) to the high vacuum pumping mode. [Pg.590]

See other pages where Roughing, vacuum crossover is mentioned: [Pg.216]    [Pg.75]    [Pg.113]    [Pg.113]    [Pg.204]   
See also in sourсe #XX -- [ Pg.113 , Pg.134 ]



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Crossover

Rough vacuum

Vacuum roughing

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