Rotating analyzer with compensator ellipsometer

Fig. 2.15 Schematic diagram of a few possible configurations of automated ellipsometers. From the top to the bottom, a rotating analyzer ellipsometer (RAE), a rotating compensator ellipsometer (RCE), and a rotating analyzer with compensator ellipsometer (RACE)...

In 1990, Y. T. Kim et al. realized a real time spectrum measurement with the combination of RPE, prism spectrometer, and optical multichannel analyzer (OMA) [32]. It took 40 ms to finish the measurement of 128 sets of ellipsometry parameters over the whole spectrum. In 2003, this group developed a generalized ellipsometer with multichannel detecting using combination of RCE and OMA [33], The measurement time depends on the rotating frequency of compensation device, and it can take 150 sets of ellipsometry parameters in the energy range of 2 - 5 eV in 0.25 seconds. 

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