Rinse-to-resistivity

Final rinse (cleaning) In wet cleaning, the surface being cleaned should be kept wet until the final rinse - that is, the last rinse before drying. This rinse should be done with ultrapure water to a specified resistivity to minimize residues. See also Rinse-to-resistivity. 

Rinse to resistivity (cleaning) Rinsing a surface in pure water until the rinse water retains a... 

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