Resistance plots using wafer

An example of such a plot is shown in Figure 3, where the increment between experimental data points is 35A, making this an extremely high resolution instrument. It is preferable to a conventional C-V profiler because it has no depth limitation and uses wafers without the need to fabricate devices. It is destructive, however, by leaving an approximately 1 mm diameter hole in the wafer. Spreading Resistance Profiling... 

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