Sensitometry, resist

There are two aspects of resist sensitometry 1) the measuiement of resist response to radiation which involves measurements designed to determine the intrinsic radiation sensitivity of the materials from which the resist is constituted and 2) lithographic sensitivity which is a measure of the efficiency with which these radiochemical conversions can be expressed in relief image formation. 

From the fundamental standpoint, the primary concern in resist sensitometry is the measurement of resist response to radiation which involves... 

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