Real time infrared reflectance-absorbance

The kinetics of the copolymerization of norbornenes and maleic anhydride has been analyzed in situ by IR spectroscopy [254]. Gas phase FT-IR has been combined with TGA to investigate outgassing from the ketal-based KRS-XE e-beam resist [222]. A flow cell which allows exposure and heating of a resist-coated wafer was attached to the IR spectrometer to study exposure- and temperature-dependent outgassing. Real time deprotection of the KRS resist has been also monitored by infrared reflectance-absorbance spectroscopy [222,494]. 

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