Reactor multichamber

By using a multichamber system [129], exchange of residual gases between successive depositions will be strongly decreased, and very sharp interfaces can be made. Furthermore, the use of a load-lock system ensures high quality of the background vacuum, and thus low levels of contaminants in the bulk layers. Multichamber reactor systems have been used for the fabrication of solar cells, and considerable improvements in energy conversion efficiency have been achieved [130, 131]. 

The multichamber reactor of Beuchet et al (7) (Fig. 9) consists of four parallel tubes, each with a specific function. The... 

Figure 9. "Multichamber" VPE reactor of Beuchet (courtesy of G. Beuchet).

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