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Reactive mixing flow discharge

Inagaki and Yasuda [3] investigated transient-stage polymer deposition by using mixed monomers, of which one component is N2. N2 is a non-polymer-forming reactive gas that does not form polymer by itself but copolymerizes with another monomer. In one type of experiment (method A), a steady-state flow of mixed monomer is established and maintained for 5 min without discharge, in which period the adsorption of organic monomer onto the substrate surface (quartz thickness monitor) and other surfaces occurs. [Pg.253]


See other pages where Reactive mixing flow discharge is mentioned: [Pg.193]    [Pg.230]    [Pg.167]    [Pg.2213]    [Pg.183]    [Pg.351]    [Pg.18]    [Pg.366]    [Pg.495]    [Pg.63]    [Pg.1969]    [Pg.167]    [Pg.2456]    [Pg.366]    [Pg.2437]    [Pg.287]    [Pg.2217]    [Pg.28]    [Pg.213]    [Pg.1306]   
See also in sourсe #XX -- [ Pg.626 ]




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