Rate gyro, Bosch

Fig. 4.1.8 Modal analysis of sensing element in Bosch s MM2 rate gyro...

Fig. 4.1.11 Part of the EFS matrix of Bosch s MM2 rate gyro. Functional parameters are normalized sensitivity S, demodulation carrier phase Ph, resolution Res, self-test signal magnitude B...

Fig. 4.1.15 Comparison of measured distribution (left) and results of Monte Carlo simulation (right) for the magnitude of the detection signal output of Bosch s MM2 rate gyro...

In designing Bosch s MM2 rate-sensing gyro, a semi resonant rotational principle was chosen that is, in-plane stimulation is resonant and electrostatic, and out-of-plane detection is also electrostatic, but off-resonant. These decisions can only be made after several studies and assessments of alternative schemes. Here, we focus only on the actually implemented principle of operation, as described in Section 4.1.4.1 (see also [15, 17-19]). 

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