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Radiation dose resist dissolution

Analysis by Dissolution Curves. Most performance indicators require only an operational definition these concepts are explained by a film dissolution curve. Figure 2 shows a family of such curves, in which the individual curves correspond to resist behavior in developer solution after exposure to the indicated radiation dose level. Figure 2 is constructed for... [Pg.339]

See other pages where Radiation dose resist dissolution is mentioned: [Pg.28]    [Pg.102]    [Pg.318]    [Pg.4298]    [Pg.11]    [Pg.28]    [Pg.99]    [Pg.56]    [Pg.212]    [Pg.220]    [Pg.528]    [Pg.172]   


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