Polysilanes substituted with carboxylic acids

Polysilanes substituted with carboxylic acids(polysilanes(III)). 

Polysilanes and polysiloxanes substituted with a phenol or carboxylic acids were soluble in TMAH aqueous solution. The resist containing the polysilanes or the polysiloxanes gave good patterns without leaving residue or distortion of the pattern. This investigation also showed that polysilanes with various functional groups can be synthesized. 

Polyphenylsilane, (PhSiH) , can be derivatized by free-radical hydrosilylation in the presence of a radical initiator. Alkenes, ketones and aldehydes react readily, to replace up to 93% of the Si-H bonds. This route can be employed to make polysilanes with hydrophilic groups, such as hydroxy, amino and carboxylic acid functions.43 Dialkylamino substituted polysilanes, made by the anionic polymerization of masked disilenes (see equation (17)), when treated with acetyl chloride give chloro-substituted poly silanes. The chlorine can then be displaced by other nucleophiles.27... 

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