Polymerizable Species Created in DC Cathode Glow

If one applies the same principle for Ar discharge to the glow discharge of organic molecules, the first step of ionization could be written as 

The ionization of an organic molecule is the basic principle of mass spectroscopy however, it should be recognized that mass spectroscopy of a simple molecule such as ethane generally shows multiple ions, covering the fragmented species to partially polymerized species, which indicates that the dissociation of the molecule and some extent of polymerization of fragmented species occurred in the mass spectrometer. The presence of the DG (cathode glow) in DC cathodic polymerization implies that the formation of chemically reactive species via ionization, as depicted by Eq. (4.1), is a very unlikely primary event under the conditions of LCVD. 

A monomer consisting of plurals of different elements could be represented by ABH instead of M for the entire molecule. In the case of TMS, A represents silicon, 

B represents carbon, and H represents hydrogen. The dissociation that occurs in the cathode glow (DG) could be represented by the following energy transfer schemes. 

The IG (negative glow) in plasma polymerization could be explained by the following reactions, in which high-energy electron is shown by e.  

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